MEMS Gyro models

MEMS gyroscopes are becoming common in Aerospace systems.  They are small, low power sensors accurate in frequency ranges good for Aerospace applications.  Often, MEMS gyros are the only sensors commerically available that provides the necessary frequency response, mass, power and environmental.

I’ve found 2 types of MEMS gyro modeling.  Both of these modeling types are for the design of the MEMS gyro.  A MEMS gyro sensor requires design of some key parameters - resonant frequency, driving frequency, and quality factor.  These articles are not on the frequency response of the sensor.    The frequency response and noise are the primary items to model for control systems.  So these design articles are high fidelity models and information purposes.

Traditional modeling of MEMS Gyros

Traditional design modeling of MEMS gyros often starts with an FEM of the sensor.  However, the FEM is often too large for feasible modeling.  FEM modeling can be infeasible for memory reasons or simply the length of time it takes to produce results.

The next step in traditional design modeling is to create an equivalent electrical circuit for detailed analysis in various software packages.  Again producing results from these equivalent circuit models is time consuming.

Wiki article on Traditional MEMS Gyro modeling

Simplified lumped parameter model for MEMS Gyros

I found a journal article describing a lumped parameter model for MEMS gyroscope design suitable for running in Simulink.  The  benefit of the Simulink lumped parameter model technique allows for much faster MEMS gyro design results through simple gains and trnsfer function blocks.  The results present in the journal article looked encouraging.

Wiki article on Simplified lumped parameter model for MEMS Gyros

More articles coming…

Accurate sensor models are necessary for any good control loop design.  So I have a couple more sensor model/design articles coming.  After that I will start adding details of MEMS gyros as I find them on the web.